摘要:This paper reports the development trends of modern lithography techniques. As a mainstream technique for VLSI fabricator, the optical lithography is advancing towards its resolution limitation, meantime, it faces the technical challenge from VLSI fabricating industry more and more. Today, the resolution of optical lithography is not enough to satisfy the fast development requirements of semiconductor industry even if the complex RET (Revolution enhancement techniques) are used in the optical lithography. Hence the NGL (Next generation lithography) techniques, such as XRL (X-ray lithography), SCALPEL (Scanning anger limited project electronic beam lithography), EBDW (Electronic beam direction writing), EUVL (Extreme ultraviolet lithography), and IPL (Ion beam project lithography) will be introduced into VLSI fabricator application for 100—70 nm line-width. Based on the NGL technique development trends and in view of the multiplicity of market inquiry, we think every NGL technique will have its survival space. However, when the characteristic width of lithography advanced into nano-meter scale (≤100 nm), only the lithography imaging at atomic level will be the last winner.
XIE Zhi 1 XIE Yaning 2 LIU Tao 2 HU Tiandou 2 YAN Wensheng 1 WEI Shiqiang 1 1
Issue 2, (2004)
摘要:The local structures of Pt thin films grown by molecular beam epitaxy with the thickness range from 3 to 105 nm have been studied by the grazing incidence fluorescence XAFS technique. The results indicate that the local structures of Pt thin films of 30 and 105 nm are similar to that of Pt foil. Four peaks located at 2.61, 3.80, 4.63, 5.43 ? appear in the radial structural function (RSF) of 105 nm Pt thin film, which are corresponding to the first, second, third and fourth Pt-Pt shells, respectively. For the first shell of 30 nm Pt thin film, the coordination number N is 11.9, the bond length R is 2.77 ?, and the Debye-Waller factor σ2 is 0.0055 ?2. With the thickness decreasing from 105 to 3 nm, the magnitude of the first RSF peak decreases obviously for the 3 nm Pt thin film, despite their peak shapes are similar. The N, R and σ2 are 10.1, 2.78 ?, 0.0077 ?2 and 11.3, 2.77 ?, 0.0061 ?2 for the Pt thin films of 3 and 10 nm, respectively. Moreover, the RSF peaks in higher shells almost disappear for the 3 and 10 nm Pt thin films. These results show that the medium-range order around Pt atoms is largely destroyed for the Pt thin films. The XAFS results imply that the local structures of 105 nm Pt thin films grown at 350—800 °C are close to that of the Pt crystal.
MA Qingli ZHAN Zhifeng WU Xiaoyi WANG Junhua YIN Zejie
Issue 2, (2004)
摘要:This article discusses the design and application of Log?Ratio Circuit of BPM system in the Phase II Project of NSRL in detail. According to log amplifier’s characters, we introduce the structure, principle and experimental results of the circuit in BPM.
DONG Lijun CHEN Dapeng XIE Changqing HAN Jingdong YE Tianchun
Issue 2, (2004)
摘要:The X-ray lithography of 1 nm wavelength is a step lithography. Compared to other next-generation lithography alternatives, the X-ray lithography can improve resolution, depth of focus, and exposure field sizes simultaneously. Another key advantage is the low cost. As the most difficult part of the X-ray lithography, the mask making technology for 50 nm X-ray lithography was discussed in this paper.
GAO Hui WANG Weibing CHEN Wentong WANG Jinxiang LI Weimin
Issue 2, (2004)
摘要:Features of a voltage/energy measuring IC AD7756 are introduced in this paper. By using this IC, we designed a voltage network monitoring system for HLS. With the bus interface of RS485, the system can monitor 64 sites simultaneously. Each site module includes 2 ADCs, a voltage reference, a temperature sensor and a relative DSP. It can set the voltage alarm threshold when working, and sample the voltage waveform in real time at the sampling rate as high as 14 kSa/s. Besides the bus interface of RS485, the common serial interface of RS232 is available too.
摘要:Thermal neutron fluence rate of one thermal neutron channel of No.101 heavy water reactor is measured by Au-foil-activated method and thermoluminescent method, respectively。The results obtained by the two methods are consistent with only an error of 8.8%.
摘要:The evaluation method of prompt γ?ray data and schemes for neutron capture, main evaluation codes and their functions, flow chart of data evaluation, data self–consistent check and their application were briefly presented in the paper.
GU Yunhong1,2 YU Zengliang1 QIN Guangyong2 HUO Yuping2 1
Issue 2, (2004)
摘要:The protection effect of DMSO and vitrification from Arabidopsis callus hazard was studied in the process of ion beam implantation. It was found that the protection effect of vitrification was higher than that of DMSO. When the implanted N+dose was increased to 200×2.6×1013cm? , survival rate of Arabidopsis callus was 2 about 60%. The result has some significance to the ion implantation research of in-vitro material.
摘要:The radium isotopes were preconcentrated in-situ from large seawater that was pumped through Mn-fiber cartridge.224Ra,226Ra and 228Ra in cartridges were counted using HPGe γ spectrometer directly. This method was used to study radium isotopes distribution in seawater of Jiaozhou Bay.
摘要:The technology of positioning nuclear components in a simulating nuclear material storage was investigated by the change of γ radiation field when some of components was moved out. Both theoretical calculation and experimental results indicated that the regulation of change of radiation field in different location was unique when a location of components was changed, by which the shift of the components could be determined.
YANG Xiaoping1 DENG Qidong1 P.Molnar2 E.T.Brown3 LI Jun4 B.C.Burchfiel2 FENG Xianyue4 1
Issue 2, (2004)
摘要:In this study we have assessed the relationship between cosmogenic nuclide content of individual clasts and the time since their deposition on three alluvium –diluvium fan surfaces. Cosmogenic nuclide accumulation represents the integrated total surface exposure of rocks in source regions during transport and since deposition. Post deposition processes (erosion, burial, bioturbation, and cryoturbation), all of which decrease the quantity of cosmogenic nuclides produced in a rock in a given time and hence the apparent exposure age, also cause significant scatter among apparent ages of samples from the surface. Very low 10Be concentration in material from active streambeds and at depth below one of the fan surfaces indicates that exposure prior to deposition onto fan surfaces was minimal, Thirty two samples are collected on three alluvium –diluvium fan surfaces, southern Tianshan piedmont, Xinjiang, China. Using the cosmic ray exposure (based on in situ-produced 10Be) dating, the average ages for the three fans are (17±3)×103 , (27±3)×103 and (25±3)×103 10Be years, respectively.
关键词:Tianshan Mountain;Alluvium –diluvium fan;10Be dating
摘要:This paper introduced the methods of producing and conserving metal lithium target film that was used in multiply fast neutron transfer reactions. Rinsing liquid paraffin out of the surface of lithium including the selection of the rinsing agent was also described.
ZHANG Xiuli WANG Yongxian YIN Duanzhi LI Junling CAO Jinquan
Issue 2, (2004)
摘要:The biological behaviors of the labeling conjugates with MAG3 were summarized. The 99Tcm labeling conjugates by using MAG3 show high labeling efficiencies and high specific activities and hold desirable stability in vitro and in vivo. The binding of the labeling conjugates with plasma protein is low; the 186/188Re labeling compounds, using MAG3 as BFCA , also hold desirable stability in vitro and in vivo. So many potentially useful biomolecules labeled by 99Tcm, 186/188Re for diagnosis and therapy may be produced via MAG3.
摘要:A retrospective analysis was performed on 72 patients with disseminated skeletal matestasis to evaluate the effect of strontium?89 or samarium?153 EDTMP therapy. There existed 87.88% of clinical response,12.12% of no response in the group treated with strontium?89 as compared with 90.24% of clinical response, 9.76% no response in that treated with samarium?153 EDTMP; and there were no correlations between the treatment results and the amounts of isotopes administrated. The results suggest that strontium?89 or samarium?153 EDTMP therapy be the first choice in the palliative treatment for disseminated skeletal matestasis.
摘要:In order to explore the antiradiation effect of tea polyphenol(TP) and ginkgo biloba leaves extracts, we have made an animal experiment. 6 groups of Kunming rats, 12 rats in each group, were investigated. Except contrast group, other 5 groups were fed with different medicals for 20 d, then all 6 groups were irradiated by Co γ-rays of 960 Gy/min for one minute. After the irridiation the rats were continually fed with the same medicals for 13d. Meanwhile we observed and recorded the death number of each group day by day. Compared with contrast, the results showed that increased living ratios of tea polyphenol, flavonoids, ginkgolide, “TP plus ginkgolide” and “TP plus flavonoids” groups were 66.6%, 41.6%, 75%, 66.6% and 75%, and their increased average living time were 2.9d (P<0.01), 1.8 d (P<0.05), 3.2 d (P<0.01), 3.1 d (P<0.01) and 3.1 d (P<0.01), respectively. The experimental results indicate that tea polyphenol and ginkgo biloba extracts have an antiradiation ability, for the poly-hydroxyl of tea polyphenol, the hydroxyl and ester bond of ginkgolide are suspected to be the foundation of the ability. It is found that the coordination effect of two materials is stronger than any one alone as they have the same chemical structures or similar functional groups.
关键词:Tea polyphenol(TP);Ginkgo biloba leaves extracts;Antiradiation function
摘要:The principle of the assessment of myocardial viability with the F-FDG SPECT and the development of 18 the imaging technology were discussed. After comparing the F-FDG SPECT with other imaging technology, the 18 18F-FDG SPECT can replace the 18F-FDG PET for detecting the myocardial viability and was superior to other imaging methods.
摘要:This paper describes the coordination systems of a three dimension radiation treatment plan. The coordination systems refer to the body coordination , the isocenter coordination and the beam coordination. We have derived the analytical equations for coordination transforms, indicated the applications of the coordination systems , and provided corresponding treating means. With strict construction and perfect structure, the systems have an important significancing for increase the whole capability of a three dimension radiation treatment plan, and can be extensively and flexibly used.