合肥先进光源光束线平面反射镜冷却方案对比

林明昊; 王梓萌; 陈杰; 杜学维; 彭旸; 徐章浪; 姜帅康; 王秋平

doi:10.3724/j.0253-3219.2026.hjs.49.250004

您当前的位置：

首页 >

文章列表页 >

合肥先进光源光束线平面反射镜冷却方案对比

同步辐射技术及应用 | 更新时间：2026-02-13

- 合肥先进光源光束线平面反射镜冷却方案对比
- Comparative study on cooling schemes for Hefei Advanced Light Facility beamline reflector
- 核技术 2026年49卷第2期文章编号：020102
- 作者机构：
  
  中国科学技术大学国家同步辐射实验室合肥 230026
- 作者简介：
  
  林明昊，男，1996年出生，2024年于中国科学技术大学获博士学位，主要从事同步辐射光学元件热管理
  陈杰，E-mail：jiechen9@ustc.edu.cn
- 基金信息：
  
  Hefei Advanced Light Facility National Major Science and Technology Infrastructure Project
- DOI：10.3724/j.0253-3219.2026.hjs.49.250004
  中图分类号： TK124
- 收稿：2025-01-07，
  
  修回：2025-04-04，
  
  纸质出版：2026-02-15
- 稿件说明：
移动端阅览
林明昊,王梓萌,陈杰等.合肥先进光源光束线平面反射镜冷却方案对比[J].核技术,2026,49(02):020102.

LIN Minghao,WANG Zimeng,CHEN Jie,et al.Comparative study on cooling schemes for Hefei Advanced Light Facility beamline reflector[J]. NUCLEAR TECHNIQUES,2026,49(02):020102.
林明昊,王梓萌,陈杰等.合肥先进光源光束线平面反射镜冷却方案对比[J].核技术,2026,49(02):020102. DOI： 10.3724/j.0253-3219.2026.hjs.49.250004. CSTR： 32193.14.hjs.CN31-1342/TL.2026.49.250004.

LIN Minghao,WANG Zimeng,CHEN Jie,et al.Comparative study on cooling schemes for Hefei Advanced Light Facility beamline reflector[J]. NUCLEAR TECHNIQUES,2026,49(02):020102. DOI： 10.3724/j.0253-3219.2026.hjs.49.250004. CSTR： 32193.14.hjs.CN31-1342/TL.2026.49.250004.

摘要

针对合肥先进光源（Hefei Advanced Light Facility，HALF）中超高分辨光栅单色器对光学元件面形的高要求，采用有限元分析（Finite Element analysis，FEA）仿真方法对平面镜（Plane Mirror，PM）三种典型冷却方案的热变形、装夹变形进行了对比研究。这三种冷却方案分别为：内部冷却方案、基于铟镓合金作为传热层的侧边冷却方案，以及基于铟膜作为传热层的侧边冷却方案。在PM最大吸收功率为64 W、峰值功率密度为0.2 W·mm

-2

时，热、装夹、重力和加工的综合面形误差要低于200 nrad才能满足光学设计的要求。在冷却水流量为2 L·min

-1

的条件下，采用液态金属（铟镓合金）侧边冷却方案能够满足热变形需求，无装夹应力，流致振动影响较小，综合面形误差为190 nrad；基于铟膜的侧边冷却方案为了获得更高的传热效率，需要装夹变形较大，且会产生较大的流致振动，综合面形误差为190 nrad；内部冷却方案虽然不存在装夹应力，但无法消除流致振动对稳定性的影响，综合面形误差为179 nrad。研究表明，基于液态金属作为传热层的侧边冷却方案在第四代同步辐射光源中具有广阔的应用潜力。

Abstract

Background

The ultra-high-resolution monochromator in Hefei Advanced Light Facility (HALF) impose stringent demands on both the surface error and stability of Plane Mirror (PM).

Purpose

This study aims to compare three cooling schemes and evaluate their effects on surface error of PM under high heat loads.

Method

Firstly

finite element analysis (FEA) simulations were systematically conducted on a 360-mm-long silicon substrate subjected to maximum absorbed power of 64 W with peak power density of 0.2 W·mm

-2

. Then

three cooling configurations were analyzed: side cooling using liquid metal (eGaIn) thermal interface

side cooling with indium film interface

and internal cooling with embedded channels. Finally

surface deformation was evaluated by peak-to-valley distortion and r

oot mean square (RMS) residual slope error at cooling water flow rate of 2 L·min

-1

Results

The FEA results show that the liquid metal (eGaIn) side-cooling method demonstrates optimal performance with total RMS surface error of 190 nrad

satisfying the 200 nrad design threshold without clamping deformation. The indium-based side cooling exhibits comparable thermal efficiency with 190 nrad total error but requires 0.6 MPa clamping pressure

resulting in 51 nrad clamping-induced deformation and higher flow-induced vibration. The internal cooling achieves minimal thermal deformation with 179 nrad total error but experiences significant flow-induced vibration due to proximity of cooling channels to optical surface.

Conclusions

The liquid metal side cooling strategy provides superior preservation of optical surface quality

it effectively balances thermal contact resistance with mitigation of flow-induced vibration through mechanically isolated support structure. Compared to indium film side cooling (contact resistance: 8.3×10

-5

·K·W

-1

at 0.6 MPa) and internal cooling

the liquid metal (eGaIn) side cooling (thermal contact resistance: 1×10

-5

·K·W

-1

) approach demonstrates critical advantages in extreme thermal-mechanical operating conditions for fourth-generation synchrotron radiation sources.

关键词

Keywords

references

冷用斌 , 周伟民 , 袁任贤 , 等 . 上海光源储存环束流位置监测系统 [J ] . 核技术 , 2010 , 33 ( 6 ): 401 – 404 . 10.3788/HPLPB20102212.2973 http://dx.doi.org/10.3788/HPLPB20102212.2973

LENG Yongbin , ZHOU Weimin , YUAN Renxian , et al . Beam position monitor system for SSRF storage ring [J ] . Nuclear Techniques , 2010 , 33 ( 6 ): 401 – 404 . 10.3788/HPLPB20102212.2973 http://dx.doi.org/10.3788/HPLPB20102212.2973

肖诚成 , 张强 , 王程 , 等 . 武汉光源高频系统中P波段160 kW连续波环行器的研制 [J ] . 核技术 , 2025 , 48 ( 1 ): 230289 . DOI: 10.11889/j.0253-3219.2025.hjs.48.230289 http://dx.doi.org/10.11889/j.0253-3219.2025.hjs.48.230289 .

XIAO Chengcheng , ZHANG Qiang , WANG Cheng , et al . Developing a 160 kW continuous wave circulator for the P-band high-frequency system of the Wuhan light source [J ] . Nuclear Techniques , 2025 , 48 ( 1 ): 230289 . DOI: 10.11889/j.0253-3219.2025.hjs.48.230289 http://dx.doi.org/10.11889/j.0253-3219.2025.hjs.48.230289 .

万钧 , 冷用斌 , 赖龙伟 , 等 . SHINE丝扫描截面测量系统样机数据采集系统研制 [J ] . 核技术 , 2022 , 45 ( 5 ): 050101 . DOI: 10.11889/j.0253-3219.2022.hjs.45.050101 http://dx.doi.org/10.11889/j.0253-3219.2022.hjs.45.050101 .

WAN Jun , LENG Yongbin , LAI Longwei , et al . Development of data acquisition system for prototype of SHINE wire scanner system [J ] . Nuclear Techniques , 2022 , 45 ( 5 ): 050101 . DOI: 10.11889/j.0253-3219.2022.hjs.45.050101 http://dx.doi.org/10.11889/j.0253-3219.2022.hjs.45.050101 .

宋文彬 , 尚雷 , 尚风雷 , 等 . 合肥先进光源注入非线性冲击磁铁设计研究 [J ] . 核技术 , 2021 , 44 ( 6 ): 060202 . DOI: 10.11889/j.0253-3219.2021.hjs.44.060202 http://dx.doi.org/10.11889/j.0253-3219.2021.hjs.44.060202 .

SONG Wenbin , SHANG Lei , SHANG Fenglei , et al . Nonlinear kicker design and research for Hefei advanced light facility [J ] . Nuclear Techniques , 2021 , 44 ( 6 ): 060202 . DOI: 10.11889/j.0253-3219.2021.hjs.44.060202 http://dx.doi.org/10.11889/j.0253-3219.2021.hjs.44.060202 .

Reininger R , Kriesel K , Hulbert S L , et al . A soft X-ray beamline capable of canceling the performance impairment due to power absorbed on its optical elements [J ] . Review of Scientific Instruments , 2008 , 79 ( 3 ): 033108 . DOI: 10.1063/1.2897587 http://dx.doi.org/10.1063/1.2897587 .

Antimonov M A , Khounsary A M , Sandy A R , et al . On the influence of monochromator thermal deformations on X-ray focusing [J ] . Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2016 , 820 : 164 – 171 . DOI: 10.1016/j.nima.2016.02.103 http://dx.doi.org/10.1016/j.nima.2016.02.103 .

Sjöblom P , Todorescu G , Urpelainen S . Understanding the mechanical limitations of the performance of soft X-ray monochromators at MAX IV laboratory [J ] . Journal of Synchrotron Radiation , 2020 , 27 ( Pt 2 ): 272 – 283 . DOI: 10.1107/S1600577520000843 http://dx.doi.org/10.1107/S1600577520000843 .

Jin L M , Zhu W Q , Wang Y , et al . A numerical comparison between internal cooling and side cooling of the reflection mirror for Spatial and Spin (S2) beam-line at SSRF [J ] . Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2018 , 902 : 190 – 196 . DOI: 10.1016/j.nima.2018.06.015 http://dx.doi.org/10.1016/j.nima.2018.06.015 .

Dolbnya I P , Sawhney K J S , Scott S M , et al . A water-cooled monochromator for the B16 Test beamline at the Diamond Light Source: capabilities and performance characterization [J ] . Journal of Synchrotron Radiation , 2019 , 26 ( Pt 1 ): 253 – 262 . DOI: 10.1107/S1600577518014662 http://dx.doi.org/10.1107/S1600577518014662 .

Oversluizen T , Matsushita T , Ishikawa T , et al . Performance of a directly water-cooled silicon crystal for use in high-power synchrotron radiation applications [J ] . Review of Scientific Instruments , 1989 , 60 ( 7 ): 1493 – 1500 . DOI: 10.1063/1.1140969 http://dx.doi.org/10.1063/1.1140969 .

Xue L , Reininger R , Wu Y Q , et al . Design of an ultrahigh-energy-resolution and wide-energy-range soft X-ray beamline [J ] . Journal of Synchrotron Radiation , 2014 , 21 ( Pt 1 ): 273 – 279 . DOI: 10.1107/S1600577513029093 http://dx.doi.org/10.1107/S1600577513029093 .

金利民 , 徐中民 , 秦宏亮 , 等 . 基于有限元的同步辐射单色器一晶安装力学分析 [J ] . 核技术 , 2017 , 40 ( 3 ): 030101 . DOI: 10.11889/j.0253-3219.2017.hjs.40.030101 http://dx.doi.org/10.11889/j.0253-3219.2017.hjs.40.030101 .

JIN Limin , XU Zhongmin , QIN Hongliang , et al . Installation mechanical analysis of the first crystal of synchrotron radiation monochromator based on finite element analysis [J ] . Nuclear Techniques , 2017 , 40 ( 3 ): 030101 . DOI: 10.11889/j.0253-3219.2017.hjs.40.030101 http://dx.doi.org/10.11889/j.0253-3219.2017.hjs.40.030101 .

Wang S F , Zhang D N , Li M , et al . Highly efficient thermal deformation optimization method for smart-cut mirrors over the entire photon energy range [J ] . Journal of Synchrotron Radiation , 2022 , 29 ( 5 ): 1152 – 1156 . DOI: 10.1107/s1600577522007160 http://dx.doi.org/10.1107/s1600577522007160 .

Cocco D , Hardin C , Morton D , et al . Adaptive shape control of wavefront-preserving X-ray mirrors with active cooling and heating [J ] . Optics Express , 2020 , 28 ( 13 ): 1 9242– 19254 . DOI: 10.1364/OE.394310 http://dx.doi.org/10.1364/OE.394310 .

Ohashi H . Present status of a high-resolution soft X-ray monochromator at BL27SU in SPring-8 [C ] // San Francisco, CA, USA : AIP Conference Proceedings . 2004 , 705 : 667 - 670 . DOI: 10.1063/1.1757884 http://dx.doi.org/10.1063/1.1757884 .

Hoszowska J , Migliore J S , Mocella V , et al . Performance of synchrotron X-ray monochromators under heat load Part 1: finite element modeling [J ] . Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2001 , 467 : 409 – 413 . DOI: 10.1016/S0168-9002(01)00335-7 http://dx.doi.org/10.1016/S0168-9002(01)00335-7 .

Zhang L , Del Río M S , Monaco G , et al . Thermal deformation of cryogenically cooled silicon crystals under intense X-ray beams: measurement and finite-element predictions of the surface shape [J ] . Journal of Synchrotron Radiation , 2013 , 20 ( Pt 4 ): 567 – 580 . DOI: 10.1107/S0909049513009436 http://dx.doi.org/10.1107/S0909049513009436 .

Zhang L , Lee W K , Wulff M , et al . The performance of a cryogenically cooled monochromator for an in-vacuum undulator beamline [J ] . Journal of Synchrotron Radiation , 2003 , 10 ( Pt 4 ): 313 – 319 . DOI: 10.1107/s0909049503012135 http://dx.doi.org/10.1107/s0909049503012135 .

Chumakov A I , Sergeev I , Celse J P , et al . Performance of a silicon monochromator under high heat load [J ] . Journal of Synchrotron Radiation , 2014 , 21 ( Pt 2 ): 315 – 324 . DOI: 10.1107/S1600577513033158 http://dx.doi.org/10.1107/S1600577513033158 .

Cutler G , Cocco D , DiMasi E , et al . A cantilevered liquid-nitrogen-cooled silicon mirror for the Advanced Light Source Upgrade [J ] . Journal of Synchrotron Radiation , 2020 , 27 ( Pt 5 ): 1131 – 1140 . DOI: 10.1107/S1600577520008930 http://dx.doi.org/10.1107/S1600577520008930 .

Zhang L , Barrett R , Friedrich K , et al . Thermal distortion minimization by geometry optimization for water-cooled white beam mirror or multilayer optics [J ] . Journal of Physics: Conference Series , 2013 , 425 ( 5 ): 052029 . DOI: 10.1088/1742-6596/425/5/052029 http://dx.doi.org/10.1088/1742-6596/425/5/052029 .

Mochizuki T , Ohashi H , Sano M , et al . Measurement of thermal contact conductance of SPring-8 beamline components [C ] // San Diego, United States : Optical Engineering + Applications . 2007 : 67050U . DOI: 10.1117/12.735397 http://dx.doi.org/10.1117/12.735397 .

Khounsary A M , Chojnowski D , Assoufid L , et al . Thermal contact resistance across a copper-silicon interface [C ] // San Diego, CA: Optical Science, Engineering and Instrumentation '97 . 1997 : 45 - 51 . DOI: 10.1117/12.294497 http://dx.doi.org/10.1117/12.294497 .

Mochizuki T , Kohmura Y , Awaji A , et al . Cryogenic cooling monochromators for the SPring-8 undualtor beamlines [J ] . Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2001 , 467 : 647 – 649 . DOI: 10.1016/S0168-9002(01)00436-3 http://dx.doi.org/10.1016/S0168-9002(01)00436-3 .

Shen Q C , Jiang M D , Wang R T , et al . Liquid metal-based soft, hermetic, and wireless-communicable seals for stretchable systems [J ] . Science , 2023 , 379 ( 6631 ): 488 – 493 . DOI: 10.1126/science.ade7341 http://dx.doi.org/10.1126/science.ade7341 .

Klemens P G , Williams R K . Thermal conductivity of metals and alloys [J ] . International Metals Reviews , 1986 , 31 ( 1 ): 197 – 215 . DOI: 10.1179/imtr.1986.31.1.197 http://dx.doi.org/10.1179/imtr.1986.31.1.197 .

Brumund P , Reyes-Herrera J , Morawe C , et al . Thermal optimization of a high-heat-load double-multilayer monochromator [J ] . Journal of Synchrotron Radiation , 2021 , 28 ( Pt 5 ): 1423 – 1436 . DOI: 10.1107/S160057752100758X http://dx.doi.org/10.1107/S160057752100758X .

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

U₃Si₂-Al弥散燃料等效热导率数值计算及建模方法研究

极紫外掩模的同步辐射在波长高分辨成像仿真研究

原位同步辐射技术在超级电容器中的应用进展

钙钛矿氧化物氧八面体旋转导致的超晶格半指数峰的模拟分析

上海光源BL02U2线站掠入射X射线衍射仪的研制