高电荷态电子回旋共振离子源难熔金属高温炉研制

黄维; 钱程; 孙良亭; 张雪珍; 曹云; 卢旺; 冯玉成; 郭俊伟; 方兴; 李锡霞; 赵红卫

doi:10.11889/j.0253-3219.2018.hjs.41.070501

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高电荷态电子回旋共振离子源难熔金属高温炉研制

核物理、交叉学科研究 | 更新时间：2021-05-19

- 高电荷态电子回旋共振离子源难熔金属高温炉研制
- Design of high temperature oven for refractory metallic ion beam production in high charge state ECR ion source
- 核技术 2018年41卷第7期文章编号：070501
- 作者机构：
  
  1.中国科学技术大学合肥 230027
  2.中国科学院近代物理研究所兰州 730000
- 作者简介：
  
  [ "黄维, 男, 1993年出生, 2014年于中国科学技术大学获硕士学位", "HUANG Wei, male, born in 1993, graduated from University of Science and Technology of China with a master's degree in 2014" ]
- 基金信息：
  
  国家自然科学基金(11427904);科技部“973”专项(2014CB845500)
- DOI：10.11889/j.0253-3219.2018.hjs.41.070501
  中图分类号： TL56
- 收稿日期：2016-09-24，
  
  修回日期：2017-06-15，
  
  纸质出版日期：2018-07-10
- 稿件说明：
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黄维, 钱程, 孙良亭, 等. 高电荷态电子回旋共振离子源难熔金属高温炉研制[J]. 核技术, 2018,41(7):070501

Wei HUANG, Cheng QIAN, Liangting SUN, et al. Design of high temperature oven for refractory metallic ion beam production in high charge state ECR ion source[J]. Nuclear techniques, 2018, 41(7): 070501
黄维, 钱程, 孙良亭, 等. 高电荷态电子回旋共振离子源难熔金属高温炉研制[J]. 核技术, 2018,41(7):070501 DOI： 10.11889/j.0253-3219.2018.hjs.41.070501.

Wei HUANG, Cheng QIAN, Liangting SUN, et al. Design of high temperature oven for refractory metallic ion beam production in high charge state ECR ion source[J]. Nuclear techniques, 2018, 41(7): 070501 DOI： 10.11889/j.0253-3219.2018.hjs.41.070501.

摘要

高电荷态电子回旋共振（Electron Cyclotron Resonance，ECR）离子源产生金属离子束的方法有炉子加热法、溅射法、MIVOC（Metallic Ion from Volatile Compounds）等，其中炉子加热法具有产生的束流强度高、稳定性好的特点。炉子加热法的技术核心是加热炉，按其工作温区主要分为低温炉、高温炉两大类。高温炉主要针对熔点1500℃以上的金属钴、钛、钒、铂、铀等。通过ANSYS仿真模拟分析了高温炉钽坩埚的温度分布、高温下因膨胀所受热应力及其在ECR离子源工作环境的强磁场中所受的安培力作用。根据模拟分析结果研制了电阻式加热高温炉，并对其进行了离线测试，实验中钽坩埚在1800℃以上发生的形变与ANSYS模拟结果相符，并根据模拟分析给出了改进方案。改进后的电阻式加热高温炉离线测试能在1500℃稳定维持48h以上，而在1846℃时可稳定维持达6h以上，结果表明：研制的电阻式加热高温炉可应用于ECR离子源产生强流高电荷态难熔金属离子束。

Abstract

Background

The methods to produce metallic ions in high charge state electron cyclotron resonance (ECR) ion source are micro-oven method

sputtering method and metallic ion from volatile compounds (MIVOC) method and so on

amongst which the micro-oven method can help produce high intensity and high reliability ion beams. There are mainly two types of micro-oven in use

i.e. low temperature oven and high temperature oven.

Purpose

High temperature oven is especially used for metals with melting temperature over 1500℃

such as cobalt

titanium

vanadium

platinum

uranium

etc.

Methods

Using ANSYS

simulation and analysis of the temperature distribution on a tantalum crucible of high temperature oven

its thermal stress at high temperature and Ampere's force under the strong ECR ion source magnetic field working condition have been performed.

Results

According to the test

the deformation of tantalum crucible over 1800℃ after off-line test is consistent with the simulation in the ANSYS well

which puts forward an improved scheme. And the improved resistor heating micro-oven can remain stable at 1500℃ for 48 h and 1846℃ for 6 h in the off-line test.

Conclusion

The designed resistor heating micro-oven can be used in ECR ion source for the production of high intensity highly charged refractory metallic ion beams.

关键词

Keywords

references

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