硬X射线亚微米聚焦高稳定柔性铰链压弯机构的模拟分析

潘要霖; 毛成文; 舒德明; 李爱国

doi:10.11889/j.0253-3219.2017.hjs.40.090102

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硬X射线亚微米聚焦高稳定柔性铰链压弯机构的模拟分析

同步辐射技术及应用 | 更新时间：2021-05-19

- 硬X射线亚微米聚焦高稳定柔性铰链压弯机构的模拟分析
- Simulation and analysis of a high-stability flexure bending mechanism for hard X-ray submicron focusing
- 核技术 2017年40卷第9期文章编号：090102
- 作者机构：
  
  1.中国科学院上海应用物理研究所嘉定园区上海 201800
  2.中国科学院大学北京 100049
  3.Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, USA
- 作者简介：
  
  [ "潘要霖, 男, 1990年出生, 2013年毕业于兰州大学, 现为硕士研究生, 研究领域为X射线微纳聚焦技术", "PAN Yaolin, male, born in 1990, graduated from Lanzhou University in 2013, master student, focusing on X-ray micro-and nano-focusing technology" ]
  李爱国, E-mail:aiguo.li@sinap.ac.cnLI Aiguo, E-mail:aiguo.li@sinap.ac.cn
- 基金信息：
  
  国家自然科学基金(U1332120)
- DOI：10.11889/j.0253-3219.2017.hjs.40.090102
  中图分类号： TL99
- 收稿日期：2017-03-03，
  
  修回日期：2017-04-11，
  
  纸质出版日期：2017-09-10
- 稿件说明：
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潘要霖, 毛成文, 舒德明, 等. 硬X射线亚微米聚焦高稳定柔性铰链压弯机构的模拟分析[J]. 核技术, 2017,40(9):090102

Yaolin PAN, Chengwen MAO, Deming SHU, et al. Simulation and analysis of a high-stability flexure bending mechanism for hard X-ray submicron focusing[J]. Nuclear techniques, 2017, 40(9): 090102
潘要霖, 毛成文, 舒德明, 等. 硬X射线亚微米聚焦高稳定柔性铰链压弯机构的模拟分析[J]. 核技术, 2017,40(9):090102 DOI： 10.11889/j.0253-3219.2017.hjs.40.090102.

Yaolin PAN, Chengwen MAO, Deming SHU, et al. Simulation and analysis of a high-stability flexure bending mechanism for hard X-ray submicron focusing[J]. Nuclear techniques, 2017, 40(9): 090102 DOI： 10.11889/j.0253-3219.2017.hjs.40.090102.

摘要

空间分辨率和聚焦效率是X射线微纳探针最关键的技术指标。压弯非球面镜具备聚焦效率高、空间分辨好、加工难度低、色散消除等优点。基于上海光源硬X射线微聚焦及应用线站的现有条件，在精确压弯理论的基础上设计了高精度柔性铰链压弯机构并进行了有限元分析，并且进一步对压弯镜体宽度进行了优化。通过长程面形仪（Long Trace Profiler，LTP）对压弯机构的测试，得到压弯非球面镜的斜率误差为430 nrad，理论上可实现230 nm的硬X射线聚焦光斑。

Abstract

Background

The spatial resolution and focusing efficiency are the key parameters for X-ray micro-and nano-probe. Aspherical bent mirror is of great advantages such as high spatial resolution

high focusing efficiency

easy machining and achromatic.

Purpose

This study aims to design a sub-micron focused bending mechanism.

Methods

A high-precision flexure bending mechanism is designed for hard X-ray micro-focusing beamline (BL15U1) at Shanghai synchrotron radiation facility (SSRF) on the basis of exact bending theory. The simulation of finite element analysis (FEA) and width optimization are completed. Finally proposed bending mechanism was tested by long trace profiler (LTP).

Results

The testing results show that the achieved slope error is 430 nrad.

Conclusion

This high-stability flexure bending mechanism can produce a theoretical spatial resolution at 230 nm.

关键词

Keywords

references

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