电子能量损失谱仪用中高能电子枪的研制

陈昕; 徐卫青; 徐龙泉; 田红春; 刘亚伟; 朱林繁

doi:10.11889/j.0253-3219.2017.hjs.40.050102

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电子能量损失谱仪用中高能电子枪的研制

同步辐射技术及应用 | 更新时间：2021-05-19

- 电子能量损失谱仪用中高能电子枪的研制
- Development of an electron gun operated at intermediate-high energies for electron energy-loss spectrometer
- 核技术 2017年40卷第5期文章编号：050102
- 作者机构：
  
  1.中国科学技术大学近代物理系合肥微尺度物质科学国家实验室合肥 230026
  2.蚌埠学院理学院蚌埠 233030
- 作者简介：
  
  [ "陈昕, 男, 1991年出生, 2014年毕业于兰州大学, 现为硕士研究生, 研究方向为原子分子物理", "CHEN Xin, male, born in 1991, graduated from Lanzhou University in 2014, master student, focusing on atomic and molecular physics" ]
  徐卫青, E-mail:xuwq412@mail.ustc.edu.cn ZHU Linfan, E-mail: xuwq412@mail.ustc.edu.cn
  朱林繁, E-mail:lfzhu@ustc.edu.cn XU Weiqing, E-mail: lfzhu@ustc.edu.cn
- 基金信息：
  
  国家自然科学基金(No.U1332204);国家自然科学基金(No.11604003)
- DOI：10.11889/j.0253-3219.2017.hjs.40.050102
  中图分类号： O463.1;O462.1;TN16
- 收稿日期：2017-02-15，
  
  修回日期：2017-03-09，
  
  纸质出版日期：2017-05-10
- 稿件说明：
移动端阅览
陈昕, 徐卫青, 徐龙泉, 等. 电子能量损失谱仪用中高能电子枪的研制[J]. 核技术, 2017,40(5):050102

Xin CHEN, Weiqing XU, Longquan XU, et al. Development of an electron gun operated at intermediate-high energies for electron energy-loss spectrometer[J]. Nuclear techniques, 2017, 40(5): 050102
陈昕, 徐卫青, 徐龙泉, 等. 电子能量损失谱仪用中高能电子枪的研制[J]. 核技术, 2017,40(5):050102 DOI： 10.11889/j.0253-3219.2017.hjs.40.050102.

Xin CHEN, Weiqing XU, Longquan XU, et al. Development of an electron gun operated at intermediate-high energies for electron energy-loss spectrometer[J]. Nuclear techniques, 2017, 40(5): 050102 DOI： 10.11889/j.0253-3219.2017.hjs.40.050102.

摘要

研制了一台电子能量损失谱仪用的中高能电子枪。其产生的电子与原子、分子发生碰撞，通过谱仪收集、分析散射电子的动量和能量，可以获得靶的电子结构和碰撞动力学信息。该电子枪结构简单，由热阴极、栅极、阳极、聚焦极和偏转板组成；电子能量可调范围大（1-3 keV），操作简单。为了获得最优的束流条件，利用SIMION电子光学软件模拟了电子发射源大小和初始发散角对靶点处的束斑大小和束流发散角的影响。在电子能量为1.5 keV条件下，实验检验给出在离电子枪出口27 mm处可获得束径约为0.95 mm、束流发散角约0.93°和束流强度6.27μA的电子束，满足电子能量损失谱仪的使用要求。

Abstract

Background

In an electron energy-loss spectroscopy (EELS) experiment

the electron emitted by the electron gun collides with atoms and molecules

and the momentum and energy of the scattered electron are analyzed by EELS

then the information of electronic structure and collision dynamics of the target can be deduced.

Purpose

A well designed intermediate-high energy electron gun with small beam size and divergence angle is needed to satisfy the requirement of EELS.

Methods

To obtain the optimal beam condition

the electron optics software SIMION was utilized to simulate the space size and divergence angle of the electron beam at target position

the electron gun has a simple structure

i.e.

consisting of thermionic cathode

grid electrode

anode electrode

focus electrode and deflection plates. The tuning range of electron energy is wide (1-3 keV) and easy to operate.

Results

The beam size of 0.95 mm

divergence angel of 0.93°

and beam current of 6.27 μA of the constructed electron gun was obtained at 27 mm from the exit of electron gun at a beam energy of 1.5 keV.

Conclusion

An electron gun which satisfies the requirements of EELS has been developed.

关键词

Keywords

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