长程面形仪测量数据的拟合方法

童新宇; 彭川黔; 何玉梅; 王劼

doi:10.11889/j.0253-3219.2016.hjs.39.080102

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长程面形仪测量数据的拟合方法

同步辐射技术及应用 | 更新时间：2021-05-24

- 长程面形仪测量数据的拟合方法
- Curve fitting algorithm for measurement data of long trace profiler
- 核技术 2016年39卷第8期文章编号：080102
- 作者机构：
  
  1.中国科学院上海应用物理研究所张江园区上海 201204
  2.中国科学院大学北京 100049
  3.重庆理工大学重庆 400050
- 作者简介：
  
  [ "童新宇, 男, 1991年出生, 2012年毕业于郑州大学, 现为硕士研究生, 研究领域为X射线光学技术", "TONG Xinyu, male, born in 1991, graduated from Zhengzhou University in 2012, master student, focusing on X-ray optical technology" ]
  王劼, E-mail:wangjie@sinap.ac.cn WANG Jie, E-mail: wangjie@sinap.ac.cn
- 基金信息：
  
  国家自然科学基金(No.11179005)
- DOI：10.11889/j.0253-3219.2016.hjs.39.080102
  中图分类号： TL99
- 收稿日期：2016-03-11，
  
  修回日期：2016-04-22，
  
  纸质出版日期：2016-08
- 稿件说明：
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童新宇, 彭川黔, 何玉梅, 等. 长程面形仪测量数据的拟合方法[J]. 核技术, 2016,39(8):080102

Xinyu TONG, Chuanqian PENG, Yumei HE, et al. Curve fitting algorithm for measurement data of long trace profiler[J]. Nuclear techniques, 2016, 39(8): 080102
童新宇, 彭川黔, 何玉梅, 等. 长程面形仪测量数据的拟合方法[J]. 核技术, 2016,39(8):080102 DOI： 10.11889/j.0253-3219.2016.hjs.39.080102.

Xinyu TONG, Chuanqian PENG, Yumei HE, et al. Curve fitting algorithm for measurement data of long trace profiler[J]. Nuclear techniques, 2016, 39(8): 080102 DOI： 10.11889/j.0253-3219.2016.hjs.39.080102.

摘要

为了寻找一种适用于长程面形仪（Long Trace Profiler

LTP）测量数据的曲线拟合算法，提高同步辐射用光学反射镜表面几何参数拟合的准确性，并合理可靠地评价同步辐射用光学反射镜表面质量，本文对镜面曲率半径、测量环境噪声和镜面测量姿态这三个可能影响镜面几何参数拟合精度的因素进行了数值模拟，采用基于代数距离的最小二乘法、基于几何距离的最小二乘法和遗传算法对模拟面形进行了拟合对比。结果表明，基于几何距离的最小二乘法对以上三个因素均不敏感，最适合长程面形仪测量数据的拟合。该方法能够给上海同步辐射光源反射镜的面形检测提供一定的参考价值。

Abstract

Background:

The Long Trace Profiler (LTP) has been widely used to measure the profile of optical mirrors used in synchrotron radiation applications. The Root Mean Square (RMS) of profile error from fitted profile is used to evaluate the quality of mirror.

Purpose:

This study aims to find a better fitting algorithm for measurement data of LTP and minimize system errors generated by fitting.

Methods:

Least square method (LSM) based on the algebraic distance

LSM based on geometric distance

and genetic algorithm have been compared for simulation profiles of the measured data of LTP with different radii

noise intensities and postures.

Results:

Simulation results showed that fitting algorithm of least-squares orthogonal geometric distances had a good noise robustness

and insensitiveness to the mirror's postures.

Conclusion:

Least-squares orthogonal distances is the most suitable curve fitting algorithm for LTP

it provides references for the profile testing of optical mirrors at SSRF.

关键词

Keywords

references

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