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1. 中国科学院高能物理研究所 东莞分部,东莞,523803
2. 东莞中子科学中心,东莞,523808
3. 北京同步辐射实验室,北京,100049
4. 中国科学院物理研究所,北京,100190
[ "作者简介:肖松文,男,1987年出生,2011年毕业于东北大学,主要从事中子谱仪机械设计" ]
[ "通讯作者: 韩庆夫,E-mail: hanqf@ihep.ac.cn E-mail:hanqf@ihep.ac.cn" ]
纸质出版日期:2015-03-09
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肖松文, 孙 远, 韩庆夫, 等. 高精度气浮支承转动平台结构设计及精度测试[J]. 核技术, 2015,38(3):030403
XIAO Songwen, SUN Yuan, HAN Qingfu, et al. Structure design and accuracy test of high precision rotation stage with air bearing support[J]. Nuclear techniques, 2015, 38(3): 030403
肖松文, 孙 远, 韩庆夫, 等. 高精度气浮支承转动平台结构设计及精度测试[J]. 核技术, 2015,38(3):030403 DOI: 10.11889/j.0253-3219.2015.hjs.38.030403.
XIAO Songwen, SUN Yuan, HAN Qingfu, et al. Structure design and accuracy test of high precision rotation stage with air bearing support[J]. Nuclear techniques, 2015, 38(3): 030403 DOI: 10.11889/j.0253-3219.2015.hjs.38.030403.
针对中国散裂中子源(Chinese Spallation Neutron Source
CSNS)多功能反射谱仪反射臂对重负载、大行程及高精度的运动要求,采用气浮支承加摩擦轮驱动的组合结构。先通过气浮支承实现反射臂与地面之间无接触无摩擦,再通过摩擦轮驱动实现反射臂绕着样品台中心进行精确定位运动。为验证该方案的可行性进行气浮支承转动平台样机的研制,并通过对气浮支承转动平台的精度测试得知在全行程范围内其单向重复定位精度为0.00031°,单向定位精度为0.0009°。试验结果表明气浮支承加摩擦轮驱动的结构能够满足多功能反射谱仪反射臂的运动要求。
Background: Multi-purpose Reflectometer (MR) is one of the three spectrometers under construction at China Spallation Neutron Source (CSNS). The reflection arm is a key component in MR
which is used to carry the neutron detector. The size of the reflection arm is 1750 mm×1000 mm×800mm (L×W×H)
and the weight is 1200kg. The reflection arm should rotate around the sample center with a rotation range of 130°
and the accuracy of the rotation should be higher than 0.001°. Purpose: This study aims to design the structure with the combination of air bearing support and friction wheel drive for the movement request of heavy load
large travel and high precision in the reflection arm. Methods: A high precision rotation stage with air bearing support is developed to verify the feasibility of this structure in which no contact and friction between reflection arm and granite floor when the air bearing works. The air floating stage is supported by three sets of air bearings
which is placed on a granite platform with the size of 1000mm×2000mm
a sample stage base is located on one side of the granite platform
a sheet steel is used to connect the air floating stage and the cross roller bearing which is installed in the sample stage base
a friction wheel is installed in the side of the air floating stage. The rotation range of the air floating stage is 45°
and the load of the air floating stage under test is 800kg. Results: The accuracy test indicates that the rotation stage with air bearing support can offer the repeatability positioning accuracy of 0.00031°
and the positioning accuracy of 0.0009° within the scope of whole rotation range. Conclusion: These results show that the structure with the combination of air bearing support and friction wheel drive can satisfy the movement requirement of the reflection arm in MR. Abstract
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