Background: Energy dispersive X-ray fluorescence spectrometer has been improved rapidly in these years. Purpose: Research status of energy dispersive X-ray fluorescence spectrometers is reviewed

covering the main components in the spectrometer and spectra processing algorithms. Methods: On the component aspect

the working principles and performances of high-voltage generator

X-ray excitation sources

especially X-ray tubes and detector are compared. On the spectra processing aspect

results of different algorithms in spectrum de-noising

background subtraction

decomposition of the peaks and calculating the intensity of the fluorescence are analyzed separately. Results: On the component aspect

the effects to sensitivity and resolution of the spectrometer being caused by the high-voltage of the voltage generator

intensity of X-ray and resolution of the detector are concluded.On the spectra processing aspect

feasibilities of various algorithms are suggested. The advantages of wavelet transform

artificial neural network and partial least-squares method are discussed. Conclusion: Present difficulties in further improving of the spectrometer performance are analyzed. The prospect and the necessity of further research of EDXRF have been suggested.