Background:107Pd is an important long-lived fission product of Palladium isotope which is important in cosmology

nuclear technology and environmental studies. The analysis of Pd by Thermal Ionization Mass Spectrometry(TIMS) is difficult because Pd has high ionization potential(8.33 eV). Purpose: The paper attempts to improve mass efficiency of Palladium in TIMS. Methods: Three loading reagents including TaF5

colloidal graphite and phosphate silica-gel are compared. In the three loading reagents

colloidal graphite and phosphate silica-gel are better than TaF5

their mass efficiency can reach 10–7. Using V-type filament

the most of mass efficiency reaches4.55×10–7which is twice as high as that by using single filament. Results: The isotope ratio of 2- g Pd sample was measured with the loading reagent of phosphate silica-gel

106Pd/108Pd deviated 0.36% with standard value

RSD was0.14%(n=10). Conclusion: The experimental results show that the measurement of microgram Palladium sample can obtain good accuracy and precision by using appropriate loading reagents and V-type filament.