Background: Inertial Confinement Fusion（ICF） now is one of the fastest-growing major fields in the world

and the study mainly focuses on the measurement of ICF targets filled with deuterium and tritium gases

which is a major unresolved technical problem and seriously hamperes the development of target fabrication technology in China.Purpose: We use nuclear analytic techniques based on nuclear microprobe system to measure the parameters of ICF targets

including the structural elements’ content and distribution

the distribution of doped element and the distribution of density.Methods: Proton Induced X-ray Emission（PIXE） is utilized to measure the distribution of dopant element Ca in ICF targets doped with Ca or not.Rutherford Back Scattering（RBS） is utilized to measure the contents of C and O and the distributions in ICF targets.Scanning Transmission Ion Microscopy（STIM） is used to measure the distribution of density.Results: The PIXE results show that the distribution of dopant Calcium is not uniform

and the ring-enrichment region indicates that the capsule is already broken.The RBS detects the thickness of each layer and the content ratios of Carbon

Oxide and Hydrogen as well as their distributions.And the STIM results show that the distribution of density is not homogeneous

neither the energy loss.Conclusions: Ion beam analytic techniques including PIXE

RBS and STIM based on nuclear microprobe system have their advantage in the measurement of ICF target.It is non-destructive

and can give the elemental content and their distribution of multi-element in the order of several micrometer.