A high-speed Monte Carlo computer program simulating the sputtering of multicom ponent multi-layer dynamic targets is presented

including computational procedure

program block diagram and applicability. The atomic scattering is governed by the Moliere approxi mation of the Thomas-Fermi potential and is evaluated with the binary-collision approximation. The procedure takes about half of the computing time used in original program with nearly the same accuracy of evaluation. This program can be used to calculate sputtering yields of multicomponent amorphous targets for keV ions bombardment and give en ergy and angular distributions of sputtered species as well as the depth of origin of the sputtered particles in solid targets.