Solid state glycine（Gly） films were implanted with 20 keV N+ ions. Then theinduced damages were studied by the measurements of electric conductivity

aminocontent in aqueous solution and α- particle transmission spectra. It is shown thatthe amount of damage products increases with increasing implantation dose and thendecreases after reaching a peak. The XPS data revealed that several damage productswere formed in which C and N elements have different binding energies that those inunimplanted glycine.