Kapton films have been modified by ion implantation. Ions of N+

Ar+ and Fg+with energy of 120keV and doses ranging from 5 × 1014 to 1 × 1017 ions/cm2 were used to the implantation . The sheet resistivity and optical absorption of modified samples were measured. Electrical conductivity of pristine has been greatly enhanced after the ion implantation . The surface microscopic structure and compositional changes that accompanied these electrical enhancements were observed using X-ray photoemission spectroscopy （XPS） and Rutherford backscattering spectroscopy（RBS）.The effect of electronic excitation energy loss on molecular degradation induced by inn irradiation was Peeved to plsy an important role.