Recent work on the XRF system with X-ray lens is reported. A lens consisting of polycapillaries with an coter diameter of 200 μm can focus a divergent X-ray beam on a spot of 250μm diameter. The spectral characteristics of the lens has been measured
experimentally. The detection limit for some element can be improved by using a lens with specific spectral characteristic. A comparative study shows that the sensitivities for the middle-heavy elements using the XRF system with X-ray lens is 10 times higher than those using the OMICRON microfluorescence analyzer without X-ray lens.