The release behavior of 3He and other impure gases from titanium tritide films were analyzed by a quadrupole mass spectrometer（QMS） in an ultravacuum metal system with a limit vacuum of Z×10-7Pa. The 3He release fraction for two titanium tritide samples with initial atomic ratio of 1.68 and 1.69 were measured in a period of 410 days. It was shown that the release fraction of the two samples was maintained in 10-5 level when the 3He concentration in samples reachs to 0.1

and the release fraction was increased 5-10 times by vibration. Analysis of impurity release from titanium tritide film shows that samples

prepared in a glass vacuum system would be polluted by oil. The mechAnism of early 3He release from titanium tritide was also discussed in this paper.