Mao Yu Zhu Weihua Wang Zhishan Chen Hanmin Xu Jianbo. Installation, adjustment and aberration control of a scanning proton microprobe[J]. Nuclear techniques, 1993, (9): 526-530.
Mao Yu Zhu Weihua Wang Zhishan Chen Hanmin Xu Jianbo. Installation, adjustment and aberration control of a scanning proton microprobe[J]. Nuclear techniques, 1993, (9): 526-530.DOI:
提高了SPM系统的空间分辨率。该系统可提供空间分辨率为2-3μm、束流强度为100pA的3MeV H
+
束和2MeV He
+
束。
Abstract
In the paper a method to install and adjust the scanning proton microprobe at SINR was described. The resolution of the SPM was improved and reached 2-3μm for 3MeV H+ and 2MeV He+ beams at a current intensity of 100pA by the aberration control.