Lu Rongrong Wang Wenmin Zhu Jieqing Le Anquan. Measurement of micron-scale elemental distribution with microbeam backscattering technique[J]. Nuclear techniques, 1993, (10): 597-601.
Lu Rongrong Wang Wenmin Zhu Jieqing Le Anquan. Measurement of micron-scale elemental distribution with microbeam backscattering technique[J]. Nuclear techniques, 1993, (10): 597-601.DOI:
The method of measuring micron-scale elemental distribution with microbeam backscattering technique is described. This method is shown to be reliable and effective by measuring Si3N4/SiC interface by proton microbeam non-Rutherford elastic backscattering. Thus
various kinds of nuclear techniques (PIXE
ion beam backscattering
etc) can be applied to non- destructive analysis of samples from light to heavy elements by using the Shanghai Nuclear Microprobe.