The transmission electron microscopy and energy spectrum techniques were used to determine the morphology

structure

composition and chemical states of elements in the IBAD MoS2-Ta composite film. A partial crystallization in the deposition process of the film and a special morphology of two sharp contrary phase areas decorated by the white granule were observed and the white granule was identified as the second phase TaS2 by a combination of TEM with XPS. Two parts of the film all have （002）

（100） and （110） orientations with larger d-spacings and lattice parameters

and the above parameters of the white area are larger than those of the film matrix. The experiments of immersion in deionized water and of oxidation at high temperature indicate that resistances of the film to hydrolysis and oxidation are obviously superior to those of the MoS

2

film deposited in the same condition.