High internal residual stress in diamond-like carbon(DLC) films is a major factor that hinders thick film fabrication.In order to solve this problem

metal vapor vacuum arc(MEVVA) technique was used.DLC film was deposited by filtered cathodic arc deposition

and Ni ions were implanted into the film.By repeating the deposition and implantation

DLC:Ni films of 10 and 15 layers and in thickness of about 1.0 μm and 1.5 μm

respectively

were fabricated.A series of structure and property tests were carried out.The results show that the internal residual stress is released effectively

with increased adhering between the film and substrate.The sp3 contents

the hardness and the elastic modulus of the films are high.These indicate that this method is a feasible technique to fabricate thick DLC films.