Tungsten films with different thickness were deposited by ion beam mixing techniques on the austenitic stainless steel. Microanalyses of XRD and SEM were measured for the deposited tungsten films before and after H + ion irradiation. The effect of the morphology and phase structure of the tungsten films by H + ion irradiation was studied. The results showed that the deposited tungsten films were nearly amorphous

and tungsten oxides were found due to the contamination of oxygen before H + ion irradiation. Simulation of H + ion irradiation on these films showed that a little crystalline tungsten was gradually transformed into amorphous and the contamination of WO 3 was significantly reduced by preferential oxygen sputtering. There is little difference between surface morphologies of tungsten films before and after H + ion irradiation. Tungsten films surfaces still showed dense

uniform

complete and no obvious damages after H + ion irradiation.