Study of theory and experiment which effects of the thickness of oxide layer on the surface of titanium tritide film on yield of neutron from deuterium reaction to tritium were done .The results of theoretical calculation show that when the energy of deuterium nuclei was 120 keV

the depth which deuterium nuclei enter into titanium tritide films is 833 nm

the range of depth which deuterium nuclei enter into oxide layer is from 527 nm to 577 nm. The experimental results indicate that oxide layer reduce the yield of neutron from deuterium reaction to tritium

and the thicker the oxide layer is

the less the yield of neutron is. When the thickness of oxide layers is within 220 nm

the linearity between the yield of neutron and the thickness of oxide layer isY=(7.524-0.01326X) ×106.