The Scanning Proton Microprobe(SPM)facility was improved by using a new designed scanning coil system.A pair of saddle-shape air core coil Was designed
and the coils Can be controlled by a remote controlling system.The performance of SPM was tested by a sample(nickel net).The results show that the system has the scanning area of 760μm×900μm for a 3 MeV proton beam.The lateral resolution was 0.9μm×l.0μm at 10 pA beam current.Individual aerosol particles and tetrahymenas were studied by the facility.The elemental distributions in these samples were obtained.