The cathode of MEVVA source was modified and co-implantation of V+C was carried out using the modified cathode at an average energy of 80keV to doses ranging from 1×10 17 to 8×10 17 cm -2 . The experimental result showed that the surface mechanical properties in the co-implanted layer were improved. The surface hardness increased 16 % - 82 %

and the wear resistance was 1.4-2.2 times of that of unimplanting surface. The maximum hardness and wear resistance were obtained from the sample with a dose of 4×10 17 cm -2 . By means of XRD

it was known that intermetallic compounds such as FeV

Cr 2VC 2

VC

Cr 23 C 6

and Fe 5C 2 were formed. These new Phases were contributed to the improvement of the surface properties for implanted layer. These results were also compared with that of V+C dual implantation. It showed that co-implanting method is more effective than dual-implantation for surface modification.