采用磁过滤阴极弧沉积技术制备含Ti类金刚石薄膜的研究

张旭; 王耀辉; 吴先映; 李强; 张荟星; 张孝吉

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采用磁过滤阴极弧沉积技术制备含Ti类金刚石薄膜的研究

更新时间：2021-03-12

- 采用磁过滤阴极弧沉积技术制备含Ti类金刚石薄膜的研究
- A study on titanium-containing diamond-like carbon films by filtered cathodic vacuum arc technology
- 核技术 2007年第12期
- 作者机构：
  
  1. 北京师范大学低能核物理研究所北京市辐射中心
  2. 北京师范大学低能核物理研究所北京市辐射中心,北京,100875
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TN304.055
- 纸质出版日期：2007-12-01
- 稿件说明：
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[1]张旭,王耀辉,吴先映,李强,张荟星,张孝吉.采用磁过滤阴极弧沉积技术制备含Ti类金刚石薄膜的研究[J].核技术,2007(12):971-974.

ZHANG Xu WANG Yaohui WU Xianying LI Qiang ZHANG Huixing ZHANG Xiaoji. A study on titanium-containing diamond-like carbon films by filtered cathodic vacuum arc technology[J]. Nuclear techniques, 2007, (12): 971-974.
[1]张旭,王耀辉,吴先映,李强,张荟星,张孝吉.采用磁过滤阴极弧沉积技术制备含Ti类金刚石薄膜的研究[J].核技术,2007(12):971-974. DOI：

ZHANG Xu WANG Yaohui WU Xianying LI Qiang ZHANG Huixing ZHANG Xiaoji. A study on titanium-containing diamond-like carbon films by filtered cathodic vacuum arc technology[J]. Nuclear techniques, 2007, (12): 971-974. DOI：

摘要

采用磁过滤阴极弧沉积技术以金属Ti为阴极在真空室中加入C2H2气体来制备含Ti类金刚石薄膜

研究不同的过滤弯管电流和在有过滤磁场存在条件下不同的C2H2气压对含Ti类金刚石薄膜的成分和组织结构的影响规律。实验结果表明:薄膜是由TiC和类金刚石两种结构组成的复合薄膜。C2H2气压和过滤弯管电流都对含Ti类金刚石薄膜的成分和组织结构有显著的影响。增加C2H2气压和过滤弯管电流都使薄膜中Ti元素的原子百分含量逐渐下降

C元素的原子百分含量逐渐增加

TiC峰强度逐渐降低

半高宽逐渐增加。

Abstract

Titanium-containing diamond-like carbon films were deposited on silicon substrate by filtered cathodic vacuum arc (FCVA) technology

Effects of C2H2 flow rate and duct current on the composition and structures of the titanium-containing diamond like carbon films were studied. The results showed that the titanium-containing diamond like carbon films were composed of TiC and diamond like carbon structure. The C2H2 flow rate and duct current affected significantly on the composition and structures of the films. The Ti content in the films decreased

but the C content increased

with increasing C2H2 flow rate and duct current.

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