Experimental testing technique of heavy ion induced single event upset (SEU) has been developed at HI-13 tandem accelerator. Monoenergetic heavy ions

well-distributed and with weak enough intensity

were obtained by using Q3D magnetic spectrometer. The irradiation ions were monitored and measured by a semiconductor detector located in the scattering chamber and a position sensitive semiconductor detector located at the focal plane of the Q3D spectrometer. Curves of SEU cross section versus linear energy transfer (LET) have been measured with eight kinds of ions for some SRAM devices. Predictions of SEU rates have been derived from the test data coupled with models of heavy ion and proton environment and models of the interaction of ions with microelectronic devices.