Production of Ca+ and He+ ions by Freeman source under the auxiliary of inert gas and the microstructure analysis of both implanted titanium foil and nano- Ti film were described. The XPX analysis for Ti film specimen implanted by Ca+ ion indicated that Ca content reached to 33 % at the implanted dose of 1×1018/cm2

and the titanium surface appeared mainly in the forms of CaTiO3

CaO and TiO2. It is clear that the implanted calcium linked up with titanium monomeric unit in the chemical conjugation. The XRD spectrum for titanium specimen implanted by He+ splits up obviously

and became more acute at the range of 15—40? The crystal sizes of the nano-film specimen on the crystal face of (100) and (101) calculated by Sherrer mode were 19.3nm and 20.2nm after implantation

still remaining nano-crystalline size. The intragranular crystal of nano-film surface reached a certain growth

and the growth of surface grain size of nano-titanium film was observed by AFM at m-visual field

but a large amount of substructure was still observed at nm-visual field. Hance based on AFM observation and XRD analysis

an important phenomenon was found that the surface granules of nano-titanium film existed after high dose implantation; and meanwhile they split up into micro-crystals remaining nano-crystalline gain size.