In order to study energetic ion range and depth profile in biological samples

transmission spectra of F ions through kidney beau coat samples and onion innersurface membrane samples have been measured with a silicon surface detector. Theion beam energy ranged from 900keV to 6MeV at a low dose rate of about 104ions/s’cm2; SEM experiment was carried out to observe sample’s topography after ionirradiation. The spectra were simulated by using computer software SINRA. Theinfluence of biological sample’s special structure and composition on ion space rangeand depth profile was discussed.