The TiCxNy films were formed on 9Cr18 steel matrix using the ion beam assisteddeposition. The TEM analysis revealed the films with a polycrystalline structure with(111)

(200) and (220) preferred orientation. The fact that TiCxNy films contain oxygencoordination was further confirmed by AES and XPS. Microhardness of the films wasfound dependent on its N content

and it was decreased for an excessively high Ncontent. An assisted dose of 3 X 1017/cm2 is optimum in this experiment. A dry frictiontest indicated that oxidation resistance of the films is excellent

and oxidation of thesteel matrix in the friction process can be obviously inhibited. Both the abrasive andadhesive wears of matrix are improved

and a trend of transformation from adhesiveinto abrasive wear appears for the steel matrix.