The features and the formation mechanism of the individual damage induced bythe energetic ions with a wide energy range from MeV to GeV were studiedsystematically. Scanning Tunneling Microscope (STM)/Scanning Force Microscope(SFM) with atomic resolution were used to observe and measure the feature and thesize of the damage in conductor and insulator

and also the relationship with theenergy deposition of incident ions in solids. In this work

the theory of two--bodycollision

thermal spike model and electronic excitation model were used to calculateand analyze the experimental results. It was found that these theoretical calculationsfitted well with the experimental data.