The technology of single point diamond turning(SPDT) is capable of achieving sample surface roughness of less than 10 nm and shape accuracy of less than 100 nm

which are crucial parameters for ultra precision machining. In research of equation of state(EOS) of materials

a target must have a surface roughness of less than 50 nm

a thickness uniformity of over 98%

and a maximum peak-to-valley height of less than 200 nm

with a proximity theatrical density.A target fabricated by SPDT has the same density as the original material

with required machining precision and surface roughness.In this paper

we report some SPDT applications in laser EOS targets fabrication

which include planar-shaped

step-shaped

and wedge-shaped targets with copper or aluminum.