Huansheng Cheng, Fujia Yang, Guoqing Zhao, et al. Determination of stoichiometry of high temperature superconducting thin films by elastic backscattering of high energy ions[J]. Nuclear techniques, 1990, 13(7): 392-395.
Huansheng Cheng, Fujia Yang, Guoqing Zhao, et al. Determination of stoichiometry of high temperature superconducting thin films by elastic backscattering of high energy ions[J]. Nuclear techniques, 1990, 13(7): 392-395.DOI:
A technique for measuring stoichiometry of Y-Ba-Cu-O thin films with an accuracy of a few percent is described. This technique utilizes non-Rutherford backscattering of 8.8 MeV helium ions
which has an increased sensitivity for
16
O by a factor of 25 over Rutherford backscattering. The method is not only well suitable to Y-Ba-Cu-O thin film but also to Bi-Sr-Ca-Cu-O and T1-Ba-Ca-Cu-O thin films.
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