Sining Mao, Xihong Yang, Jian Chen, et al. The investigation of ion beam mixing and phase transformation in Ni/Si system[J]. Nuclear techniques, 1988, 11(3): 52-55,64.
Sining Mao, Xihong Yang, Jian Chen, et al. The investigation of ion beam mixing and phase transformation in Ni/Si system[J]. Nuclear techniques, 1988, 11(3): 52-55,64.DOI:
The nickel silicide phases produced by ion beam mixing were investigated. Ni
2
Si
NiSi and NiSi
2
phases were obtained with different implantation parameters. The dynamic process of phase transformation and the mechanism of ion beam mixing were also discussed.
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