Wei Tian, Jun Li, Weiping Cai. Effect of target temperature during ion bombardment on surface character[J]. Nuclear techniques, 1988, 11(3): 35-38,62.DOI:
ions at different target temperature. The anodic current density I
c
after the ion bombardment was decreased by one order of magnitude. The surface stress was reduced remarkably with rising temperature. TEM examination indicated that the near-surface structure for the samples bombarded at -80℃ was quite different from those at 600℃.
关键词
Keywords
references
C. A. Santos et al . , J. Phys. D: Appl. Phys. , 17 ( 1984 ), 3 : 551 .
Z. L. Lian and J. W. Mayer , Ion bombardment effects on material composition
J. M. Poate et al . , Surface modification and alloying , Plenum Press , New York, London , 1983 , p. 241 .
G. Dearnaley . Thin Films , 107 ( 1983 ), 3 : 315 .
J. W. Mayer et al . , Nucl. Instr. Meth. , 182/183 ( 1981 ), 1 .
B. Y. Tsaur et al . , Appl. Phys. Lett. , 36 ( 1980 ), 823 .
Zhou Peide et al . , The 9th ICMC , Tornto Canada , 1984 , p. 269 .