J. Lindhard , Dan. Vidensk. Selsk. Mat-Fys. Medd. , 34 , No. 14 , ( 1965 ).

J. W. Mayer and E. Rimini , Ion beam handbook for material analysis , Academic Press. Inc. , New York , 1977 .

G. Z. Moliere , Naturforsch , A2 , 133 ( 1947 ).

J. U. Andersen et al. , Nucl. Instr. Meth . , 38 , 210 ( 1965 ).

石原宏 ， 应用物理 , 45 , 4 , 355 ( 1976 ).

J. F. Ziegler ed. , New uses of ion accelerators , Plenum Press , New York , 1975 .

G. Carter . Ion implantation of semiconductors .

J. F. Gibbons et al. , Projected range statistics, semiconductors and related materials , Distributed by Halsted Press.

R. T. Fulks et al. , Appl. Phys. Lett. , 39 , 8 , 604 ( 1981 ).

S. U. Campisano et al. Nucl. Instr. Meth. , 149 , 371 ( 1978 ).

J. H. Barrett , Phys. Rev. , 3B , 1527 ( 1971 ).

E. Bogh , Can. J. Phys. , 46 , 653 ( 1968 ).

J. F. Ziegler , Handbook of stopping cross-section for energetic ions in all elements , Vol.5 .

承焕生 等 ， 原子核物理 , 3 , 2 , 177 ( 1981 )。