Recent advances with the scanning proton microprobe

Zhu Jieqing; Allan G. L.; Legge G. J. F.; McCallum J. C.; McKenzie C. D.; Camakaris J.

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Recent advances with the scanning proton microprobe

科研成果报告 | 更新时间：2022-08-16

- Recent advances with the scanning proton microprobe
- Recent advances with the scanning proton microprobe
- 核技术 1986年09卷第4期
- 作者机构：
  
  University of Melbourne, Australia
- 作者简介：
  
  * Permanent address: Shanghai Institute of Nuclear Research, Shanghai, China.
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：1982-11-21，
  
  纸质出版日期：1986-04
- 稿件说明：
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Zhu Jieqing, Allan G. L., Legge G. J. F., 等. Recent advances with the scanning proton microprobe[J]. 核技术, 1986,09(4):5-14,26,27.

Jieqing Zhu, G. L. Allan, G. J. F. Legge, et al. Recent advances with the scanning proton microprobe[J]. Nuclear techniques, 1986, 09(4): 5-14,26,27.
Zhu Jieqing, Allan G. L., Legge G. J. F., 等. Recent advances with the scanning proton microprobe[J]. 核技术, 1986,09(4):5-14,26,27. DOI：

Jieqing Zhu, G. L. Allan, G. J. F. Legge, et al. Recent advances with the scanning proton microprobe[J]. Nuclear techniques, 1986, 09(4): 5-14,26,27. DOI：

摘要

The scanning proton microprobe has established itself as an essential tool for quantitative and trace elemental microscopical analysis and for nondestructive depth profiling

This paper discusses the major strengths and limitations of the instrument

the advances that have been made and the directions in which instrumental research is progressing to enable further improvements in probe performance. Recent applications in medical and in semi-conductor research are presented in order to illustrate the significance of these improvements.

Abstract

The scanning proton microprobe has established itself as an essential tool for quantitative and trace elemental microscopical analysis and for n on-destructive depth profiling. This paper discusses the major strengths and limitations of the instrument

the advances that have been made and the directions in which instrumental research is progressing to enable further improvements in probe performance. Recent applications in medical and in semiconductor research are presented in order to illustrate the significance of these improvements.

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references

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