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Effect of substrate temperature on surface morphology and mechanical properties of Ti films
ACCELERATOR, RAY TECHNOLOGY AND APPLICATIONS | 更新时间:2024-10-25
    • Effect of substrate temperature on surface morphology and mechanical properties of Ti films

    • “In the field of materials science, researchers have used resistance evaporation coating technology to deposit titanium films on the surface of molybdenum substrates, and characterized the microstructure and mechanical properties of the titanium films through XRD, SEM, AFM and other methods. Research has found that the substrate temperature has a significant impact on the grain orientation, grain size, surface roughness, and elastic modulus of titanium films. As the substrate temperature increases, the preferred orientation of the titanium film changes from (101) to (002), and the grain size, roughness, and elastic modulus all increase.”
    • NUCLEAR TECHNIQUES   Vol. 46, Issue 10, Article number: 100202(2023)
    • DOI:10.11889/j.0253-3219.2023.hjs.46.100202    

      CLC: TG115
    • Received:10 April 2023,

      Revised:28 April 2023,

      Published:15 October 2023

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  • WANG Xing,MA Mingwang,WAN Ruiyun,et al.Effect of substrate temperature on surface morphology and mechanical properties of Ti films[J].NUCLEAR TECHNIQUES,2023,46(10):100202. DOI: 10.11889/j.0253-3219.2023.hjs.46.100202.

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