Effect of substrate temperature on surface morphology and mechanical properties of Ti films
ACCELERATOR, RAY TECHNOLOGY AND APPLICATIONS|更新时间:2024-10-25
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Effect of substrate temperature on surface morphology and mechanical properties of Ti films
“In the field of materials science, researchers have used resistance evaporation coating technology to deposit titanium films on the surface of molybdenum substrates, and characterized the microstructure and mechanical properties of the titanium films through XRD, SEM, AFM and other methods. Research has found that the substrate temperature has a significant impact on the grain orientation, grain size, surface roughness, and elastic modulus of titanium films. As the substrate temperature increases, the preferred orientation of the titanium film changes from (101) to (002), and the grain size, roughness, and elastic modulus all increase.”
WANG Xing,MA Mingwang,WAN Ruiyun,et al.Effect of substrate temperature on surface morphology and mechanical properties of Ti films[J].NUCLEAR TECHNIQUES,2023,46(10):100202.
WANG Xing,MA Mingwang,WAN Ruiyun,et al.Effect of substrate temperature on surface morphology and mechanical properties of Ti films[J].NUCLEAR TECHNIQUES,2023,46(10):100202. DOI: 10.11889/j.0253-3219.2023.hjs.46.100202.
Effect of substrate temperature on surface morphology and mechanical properties of Ti films
REN Chunsheng MOU Zongxin LIU Zhenmin LONG Zhenhu YANG Liming
Related Institution
The Research Center of Semiconductor Functional Film Engineering Technology, Shanghai Institute of Microsystem and Information Technology, the Chinese Academy of Sciences, Shanghai 200050) 2
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The State Key Laboratory for Material Modification by Three Beams, Dalian University of Technology