Development of high energy and high flux argon ion gun
NUCLEAR ELECTRONICS AND INSTRUMENTATION|更新时间:2024-10-25
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Development of high energy and high flux argon ion gun
“In the field of optical component polishing, experts have designed high-energy and high beam argon ion guns to achieve high-precision and rapid polishing of large-diameter silicon carbide non spherical mirrors.”
ZHU Meiqiang,SHI Xiaoqian,TANG Wa,et al.Development of high energy and high flux argon ion gun[J].NUCLEAR TECHNIQUES,2021,44(09):39-44. DOI: 10.11889/j.0253-3219.2021.hjs.44.090401.
Development of high energy and high flux argon ion gun