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Structure design and accuracy test of high precision rotation stage with air bearing support
更新时间:2021-03-03
    • Structure design and accuracy test of high precision rotation stage with air bearing support

    • NUCLEAR TECHNIQUES   Vol. 38, Issue 3, Article number: 030403(2015)
    • DOI:10.11889/j.0253-3219.2015.hjs.38.030403    

      CLC:
    • Published:09 March 2015

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  • XIAO Songwen, SUN Yuan, HAN Qingfu, et al. Structure design and accuracy test of high precision rotation stage with air bearing support[J]. Nuclear techniques, 2015, 38(3): 030403 DOI: 10.11889/j.0253-3219.2015.hjs.38.030403.

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