

浏览全部资源
扫码关注微信
中国科学院上海应用物理研究所
Published:01 August 2013
移动端阅览
[1]程甲一,张祥志,邰仁忠.纳米CT样品漂移在线自动校正研究[J].核技术,2013,36(08):3-9.
CHENG Jiayi, ZHANG Xiangzhi, TAI Renzhong. Study of online automatic calibrations of Nano-CT sample drift at SSRF[J]. Nuclear techniques, 2013, 36(8): 080101
[1]程甲一,张祥志,邰仁忠.纳米CT样品漂移在线自动校正研究[J].核技术,2013,36(08):3-9. DOI: 10.11889/j.0253-3219.2013.hjs.36.080101.
CHENG Jiayi, ZHANG Xiangzhi, TAI Renzhong. Study of online automatic calibrations of Nano-CT sample drift at SSRF[J]. Nuclear techniques, 2013, 36(8): 080101 DOI: 10.11889/j.0253-3219.2013.hjs.36.080101.
为满足广大用户对样品数十纳米高空间分辨率三维精细结构测量的强烈需求
基于上海光源软X光谱学显微光束线站
研制了一套满足实验要求的常温纳米CT系统。系统中随着转台转动
样品出现严重漂移问题
极大地影响了CT实验的精度和效率。本文利用系统现有的可见光显微镜(VLM)
记录样品转动过程中的漂移轨迹
计算出样品的漂移规律
用软件在线自动校正由角度转动而产生的样品漂移
实验结果表明样品漂移控制在1 m精度内
达到了实验要求5 m的精度范围
保证了纳米CT实验能够连续自动进行
大大提高了纳米CT的工作效率。
Background: In order to satisfy the researchers’ strong requirement for a three-dimensional fine structure of the sample with high spatial resolution
the Nano-CT system based on the BL08U soft X-ray microspectroscopy station of Shanghai Synchrotron Radiation Facility(SSRF) has been developed
but sample drifted seriously while CT scanning.Purpose: The sample drift greatly reduces the accuracy and efficiency of CT experiment
so that an accurate online automatic calibration is necessary.Methods: Sample drift trajectory can be recorded in the rotation process by visible light microscope(VLM)
and then the shift data of every angle can be obtained which can be used in calibration online.Results: The sample drift had been calibrated and limited below 1 m after the calibration algorithm
which meet the accuracy requirement of the CT experiments.Conclusions: Automatic calibration greatly improves the efficiency and accuracy of Nano-CT experiment.
0
Views
25
下载量
0
CSCD
Publicity Resources
Related Articles
Related Author
Related Institution
京公网安备11010802024621