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1. 南京大学物理学院
2. 无锡爱邦辐射技术有限公司
Published:2013
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[1]杭德生,张治平,张宇蔚,史晓东,高宝山,刘星.应用电子辐照技术试制硅塑封快速二极管及性能研究[J].核技术,2013,36(01):68-72.
HANG Desheng1 ZHANG Zhiping1 ZHANG Yuwei2 SHI Xiaodong1 GAO Baoshan1 LIU Xin1 1. Trial-produce and performance research of fast diode by using high-energy electron irradiation technology[J]. Nuclear techniques, 2013, 36(1): 010401
[1]杭德生,张治平,张宇蔚,史晓东,高宝山,刘星.应用电子辐照技术试制硅塑封快速二极管及性能研究[J].核技术,2013,36(01):68-72. DOI: 10.11889/j.0253-3219.2013.hjs.36.010401.
HANG Desheng1 ZHANG Zhiping1 ZHANG Yuwei2 SHI Xiaodong1 GAO Baoshan1 LIU Xin1 1. Trial-produce and performance research of fast diode by using high-energy electron irradiation technology[J]. Nuclear techniques, 2013, 36(1): 010401 DOI: 10.11889/j.0253-3219.2013.hjs.36.010401.
介绍了采用高能12 MeV电子辐照效应来控制快速二极管少子寿命的方法
探讨了高能电子辐照对器件少子寿命τ、反向恢复时间trr和正向峰值压降VFM的影响
用高分辨率深能级瞬态仪(DLTS)测定和研究了引入缺陷能级的性质。应用研究结果表明
辐照快速二极管体内引入的缺陷能级是导致其电参数trr和VFM变化的直接原因
该技术可成功取代传统的掺金工艺
并具有τ控制精确
trr和VFM一致性好、重复性好、合格率高、工艺简便的优点
是一项具有发展前途的工艺技术。
This paper reported the new technology on controlling the minority carrier life time of fast diode by using high energy 12 MeV electronic radiation
discussed the influence of high-energy electron irradiation to the device’s reverse recovery time trr and positive peak pressure drop VFM
and studied the nature of the defects’ energy level.Application results show that the defect level introduced by irradiation directly cause the VFM and trr’s change
this technology can successfully replace the traditional technique of gold doped process
and have a lot of advantages such as high control precision
high consistency of trr and VFM
repeatability
high percent of pass and simple process
so this technology has promising future.
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