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中国科学院上海原子核研究所
Published:01 March 1991
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[1]荣廷文,成源棣,鲍锦荣,林森浩.质子活化分析法测定硅中微量碳[J].核技术,1991(03):176-178.
Rong Tingwcn Cheng Yuandi Bao Jinrong Lin Senhao. Proton activation analysis of carbon in silicon[J]. Nuclear techniques, 1991, (3): 176-178.
[1]荣廷文,成源棣,鲍锦荣,林森浩.质子活化分析法测定硅中微量碳[J].核技术,1991(03):176-178. DOI:
Rong Tingwcn Cheng Yuandi Bao Jinrong Lin Senhao. Proton activation analysis of carbon in silicon[J]. Nuclear techniques, 1991, (3): 176-178. DOI:
本文叙述了利用
13
C(p
y)
N和
n)
N核反应
并用碱熔融法
以NH
3
的形式分离出
N来测定半导体硅中的微量碳。方法灵敏度可达0.1ppm。
The determination of carbon in silicon by proton activation was described. 12C (p
γ)15N and 13C(p
n)13N reactions were used. 13N was separated by an alkaline melting process. Sensitivity of the method is 0.1 ppm.
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