A new scanning proton microprobe equipped with a long focus Russian magnetic quadruplet is set up. With excellent performances of ion optics

it can be used to do experiments of PIXE

RES

RFS

NRA and channelling simultaneously within a micron-region. The power supplies for quadruplet and scanning coils are controlled by an IBM-PC computer and a scanning graphical monitor based on an Apple Ⅱe microcomputer provides convenience of searching for an interesting area to scan. The advanced modes of the fast random scan and the event-by-event data collection make it possible to treat the multi-parameter and multi-detector data by means of the strategy of TQSA （Total quantitative scanning analysis） There are three types of graphical display including the innovation of three dimensional contour mapping.