XYH-86 X-ray fluorescence coating thickness gauge for small areas

Le Anquan Lin Jinxin Zhu Jieqing Gu Yingmei Gu Lianxue Han Fasheng Xu Junquan Wang Yuzheng Wang Zhifang

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XYH-86 X-ray fluorescence coating thickness gauge for small areas

更新时间：2021-04-20

- XYH-86 X-ray fluorescence coating thickness gauge for small areas
- NUCLEAR TECHNIQUES Issue 9, (1991)
- 作者机构：
  
  中国科学院上海原子核研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：01 September 1991
- 稿件说明：
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[1]乐安全,林金锌,朱节清,谷英梅,顾连学,韩发生,徐君权,王裕政,王志芳.XYH-86小面积X荧光涂层测厚仪[J].核技术,1991(09):513-519.

Le Anquan Lin Jinxin Zhu Jieqing Gu Yingmei Gu Lianxue Han Fasheng Xu Junquan Wang Yuzheng Wang Zhifang. XYH-86 X-ray fluorescence coating thickness gauge for small areas[J]. Nuclear techniques, 1991, (9): 513-519.
[1]乐安全,林金锌,朱节清,谷英梅,顾连学,韩发生,徐君权,王裕政,王志芳.XYH-86小面积X荧光涂层测厚仪[J].核技术,1991(09):513-519. DOI：

Le Anquan Lin Jinxin Zhu Jieqing Gu Yingmei Gu Lianxue Han Fasheng Xu Junquan Wang Yuzheng Wang Zhifang. XYH-86 X-ray fluorescence coating thickness gauge for small areas[J]. Nuclear techniques, 1991, (9): 513-519. DOI：

摘要

本仪器利用X射线荧光分析原理和微机技术研制而成的。以小型X射线管作激发源

射线用小孔准直

样品用光学定位

样品最小测量面直径为0.1mm。微机多道实时显示能谱。它能快速、精确、无损测量多种微小面积上的单、双涂层厚度和合金涂层厚度及成分

结果由屏幕显示并打印输出

还能作统计处理。

Abstract

This instrument was based on the XRF technique and microcomputer. X-ray radiation from a small X-ray tube was collimated with a small hole and the emitted fluorescence spot at the surface of a sample could be seen with an optical microscope. The minimum diameter of the measuring area was 0.1mm. A microcomputer-based MCA was used. The unit was able to measure thickness of either single or double coating layers noEdestructively and determine thickness and composition of an alloy coating layer simultaneously.

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中国科学院上海原子核研究所

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