Simulation investigation on properties of energy spectrum of sputtered particles

Shao Qiyun

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Simulation investigation on properties of energy spectrum of sputtered particles

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- Simulation investigation on properties of energy spectrum of sputtered particles
- NUCLEAR TECHNIQUES Issue 10, (1991)
- 作者机构：
  
  复旦大学
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：01 October 1991
- 稿件说明：
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[1]邵其鋆.溅射粒子能谱特性的模拟研究[J].核技术,1991(10):584-588.

Shao Qiyun. Simulation investigation on properties of energy spectrum of sputtered particles[J]. Nuclear techniques, 1991, (10): 584-588.
[1]邵其鋆.溅射粒子能谱特性的模拟研究[J].核技术,1991(10):584-588. DOI：

Shao Qiyun. Simulation investigation on properties of energy spectrum of sputtered particles[J]. Nuclear techniques, 1991, (10): 584-588. DOI：

摘要

本文用线性级联理论及基于两体碰撞近似的蒙特卡罗模拟方法研究溅射粒子的能量分布

着重讨论能谱形状及不同入射角对能谱的影响;并且给出二元靶溅射时能谱的平均能量与靶成分的关系。

Abstract

In this paper

energy distributions of sputtered particles are investigated by using the linear cascade theory and Monte Carlo simulation based on the binary collision approximation. The shape of energy distributions and the dependence of energy distributions on the angle of incidence arc discussed. Furthermore the effect of two-component target composition on the mean energy of sputtered particles is presented.

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