The wear resistance and optical properties of TiN thin films prepared by ion beam mixing

Yan Pengxun

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The wear resistance and optical properties of TiN thin films prepared by ion beam mixing

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- The wear resistance and optical properties of TiN thin films prepared by ion beam mixing
- NUCLEAR TECHNIQUES Issue 2, (1994)
- 作者机构：
  
  1. 兰州大学
  2. 中国科学院物理研究所
  3. 兰州大学中国科学院物理研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC： TB43
- Published：01 February 1994
- 稿件说明：
移动端阅览
[1]阎鹏勋,杨思泽.离子束混合形成氮化钛膜的摩擦和光学性能[J].核技术,1994(02):74-77.

Yan Pengxun. The wear resistance and optical properties of TiN thin films prepared by ion beam mixing[J]. Nuclear techniques, 1994, (2).
[1]阎鹏勋,杨思泽.离子束混合形成氮化钛膜的摩擦和光学性能[J].核技术,1994(02):74-77. DOI：

Yan Pengxun. The wear resistance and optical properties of TiN thin films prepared by ion beam mixing[J]. Nuclear techniques, 1994, (2). DOI：

摘要

用载能氮离子束轰击纯铁镀钛膜样品，成功地形成了金黄色氨化钛薄膜。结果表明；注入剂量为０．５×１０１７Ｎ＋／ｃｍ２的混合样品表面颜色与纯金类似；氮离子束混合样品表面显微硬度及耐磨性都远优于纯铁基体，且随离子剂量的增加，混合样品的表面硬度和耐磨性也提高。

Abstract

The TiN thin films are produced on the Ti plated iron samples by N ion beam mixing.The mechanical measurements show that the samples are of high hardness and good wear resistance after N ion beam mixing.The sample with0.5×1017N+/cm2ion beam mixing has a golden appearance and its reflectance curve within the range of visible spectrum resembles that of pure TiN.

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