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1. 复旦大学现代物理研究所,上海
2. 中国科学院上海冶金研究所离子束开放研究实验室,上海
3. ,200050
Published:01 June 1998
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[1]岳岩,霍裕昆,潘正瑛.脉冲激光沉积薄膜生长机制的计算机模拟研究[J].核技术,1998(06):329-333.
Computer simulations of film-growth mechanism in pulsed laser deposition[J]. Nuclear techniques, 1998, (6): 329-333.
建立了一个分子动力学模型以研究脉冲激光沉积金属薄膜的成膜过程,探讨激光沉积中极高的瞬时沉积率和载能粒子轰击对成模机制的影响。以能量为10eV的Cu原子入射到Cu(100)表面为例,进行了分子动力学模拟的计算。结果表明,激光成膜过程中载能粒子的瞬时高通量沉积极大地增加了外延表面的原子扩散活性,促使薄膜能在低温下以原子层尺度逐层生长。
The growth of metallic films by the pulsed laser deposition (PLD) technique is studied with a new molecular dynamics model. By taking Cu on Cu(100) surface as an example
the simulations show that the high momentary deposition rate and energetic particle impact in the PLD process can promote surface atomic mobility and lead to layer-by-layer growth of films at lower substrate temperatures.
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