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Damage Production in Silicon high energy Ar ion implantation
更新时间:2022-08-16
    • Damage Production in Silicon high energy Ar ion implantation

    • NUCLEAR TECHNIQUES   Issue 8, (1998)
    • CLC: O78
    • Published:01 August 1998

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  • Damage Production in Silicon high energy Ar ion implantation[J]. Nuclear techniques, 1998, (8). DOI:

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