The first level plasmons of Si (located at B.E.116.95eV) and SiO 2 (located at B.E.122.0eV) in radiation hard and Si-SiO 2were investigated by XPS before and after 60 Co irradiation. The experimental results indicate that the interface consisting of the two plasmons extends toward the surface of SiO 2
and the centre of the interface moves toward the surface of SiO 2 after the irradiation. The concentration of plasmons depends on radiation dose
irradiation bias field and the growth process of Si-SiO 2.