The surface structure and tribological properties of α-Al 2O 3 implanted with N + ions have been investigated by XPS
X-ray diffraction
Raman shift
SEM
DFPM and scratch testers. It is shown that lubrication of the implanted Al 2O 3 is greatly improved because a strong contaminated carbon film is formed on the Al 2O 3 surface and the surface hardness is increased in implanting process. The surface compressive stress due to the implantation can also make the surface fractures short and round