A study on screening techniques of radiation-resistive transistors by electron beam pre-irradiation

Lin Maoqing    Lin Xigang

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A study on screening techniques of radiation-resistive transistors by electron beam pre-irradiation

更新时间：2021-04-09

- A study on screening techniques of radiation-resistive transistors by electron beam pre-irradiation
- NUCLEAR TECHNIQUES Issue 10, (1997)
- 作者机构：
  
  四川联合大学原子核科学技术研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN32
- Published：01 October 1997
- 稿件说明：
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[1]林茂清,林锡刚.电子束预辐射筛选抗辐射晶体管工艺的初步研究[J].核技术,1997(10):50-55.

Lin Maoqing Lin Xigang. A study on screening techniques of radiation-resistive transistors by electron beam pre-irradiation[J]. Nuclear techniques, 1997, (10).
[1]林茂清,林锡刚.电子束预辐射筛选抗辐射晶体管工艺的初步研究[J].核技术,1997(10):50-55. DOI：

Lin Maoqing Lin Xigang. A study on screening techniques of radiation-resistive transistors by electron beam pre-irradiation[J]. Nuclear techniques, 1997, (10). DOI：

摘要

介绍了用电子束预辐射损伤法研究晶体管抗β射线损伤能力的工作。研究经预辐射损伤的晶体管在不同电子束能量、束流密度及不同时间下进行退火处理后性能的恢复能力，为“预辐射损伤－辐射退火”筛选抗辐射晶体管工艺提供了一定的理论和实验依据。

Abstract

? The β-ray resistive ability of transistors and the recovery ability of the pre-irradiation damaged transistors after annealing for different time with various energies and densities of electron beam have been studied Some theoretical and experimental bases have been laid for the screening of radiation-resistive transistors by the “pre-irradiation damage-annealing” techniques

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